Massachusetts Institute of Technology
3.155J / 6.152J Microelectronics Processing Technology
Fall Term 2003
Problem Set 5,Etching
Out,October 29,2003 Due,November 5,2003
All the questions are from Plummer,Chapter 10,p.679-680,which
was handed out in class,
1) Question 10.3
2) Question 10.4
3) Question 10.5
4) Question 10.6
5) Question 10.8