Prof,Shi Wenkang
SAW Technology
and
Its Applications
Shanghai Jiao Tong University
P.R.CHINA
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
What is SAW?
SAW----Surface Acoustic Wave
Concept
Concept,What is SAW?
? Mechanical Wave
? propagate in the surface
Energy Concentrated in the thin layer (<1λ )
? Different Modes:
RSAW,LSAW,LLSAW,SH-SAW,Love Wave,
LAMB Wave….
? Much lower velocity than Electromagnetic
Wave’s (1,105)
Concept,Physical Principal
Based on:
1,Piezoelectric effect and Converse Piezoelectric effect
Mechanical Electrical
2,Wave reflected at discontinuity media
Concept,Historical Review
1885 Discovery by British Physicist Releigh In Research on
seismic Wave
1949 Bell Lab Discovery LiNbO3
1965 Exciting SAW artificially by American Scientist
R.M.White and Voltmer Using Interdigital Transducer(IDT)
Since 1970’s
Wide Applications in Telecommunication,Radiobroadcast,
TV etc.
Since 1980’s
SAW Sensor Development
Concept,Advantages
? High Sensitivity
? High Accuracy
? Passive
? Wireless
? Digitalized
? Mass Production
? Many Application-Possibilities
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
Materials
Piezo-Materials:
Quartz LiNbO3 LiTaO3 LGS
The Properties SAW related:
1,Mechanical-Electronic Coupling Coefficient.
2,Temperature Related Factor ( TCF )
3,Dielectric Factor 4,Phase Velocity
5,Yang’s Model 6,Density
7,Insertion Loss 8,Elastic Coefficient
Different Materials,Different Cut Orientation has different
properties,so Optimum,Compromise Design be Needed.
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
Mathematic Model
Force Equilibrium Equation
Electronic Charge Equilibrium Equation
Cristoffel Equation
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
Type of SAW devices
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
Typical Applications
sensor
Delay line
Convolver
Oscillator
filter
Vibration and Acceleration SAW Sensor
Torque SAW Sensor
SAW Voltage Sensor
Flow SAW Sensor
SAW Gyroscope
2,coriolis力
产生第二次
声表面波
x
?
v
F
z
y
Liquid SAW Sensor
Gas SAW Sensor
SO2,H2S,CO,NO2,H2 etc.
Application Examples of SAW
technology in Automobile
Electronic ID
Smart Tire
Exhaust-gas Detection
Electronic ID
Smart Tire
Exhaust-gas detection
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
? New material,new technology;
? Suitable SAW models,suitable
packaging;
? Intelligence,minimization,multi-
function,matrixing;
? Industrialization.
Development Tendency
Outline
Concept
Materials
Mathematic Model
Type of SAW Device
Typical Applications
Development Tendency
Research on SJTU
Research on SJTU
Theoretical work:
--- Numerical method to solve
Christoffe equation
--- Various wave characteristics
--- Optimal design
--- Phase detection criterion
--- Coupling mode theory
Research on SJTU
Laboratory work:
--- Fabrication and test of SAW devices
ID-Tag prototype Lamb wave device
(measuring liquid density)
--- Circuit design and implementation
wireless data transmission platform for
conventional sensors
Lamb wave liquid density sensor
Lamb wave liquid density sensor
SAW device prototype
Electronic Circuit
Schematic of transceiver circuits
Experiment System
Results- Lamb Liquid Density
Frequency Response of Substrate
in Two Different Conditions
1- Liquid-covering
2- No liquid-covering
Results- Lamb Liquid Density
The relation
between the
Phase Bias and
Liquid Density
Results- ID-Tag
Measured impulse response vs,time
of an ID-tag with bits 1111
Measured impulse response vs,time
of an ID-tag with bits 1011
SAW Pressure Sensor
SAW Pressure Sensor Experiment
System
Discussion on Key Problems
Pressure sensitive
coefficient
distribution of
substrate on
(0o,90o,0o)
Discussion on Key Problems
Pressure sensitive
coefficient
distribution of
substrate on
(7o,143.6o,31.8o)
Projects
1.上海市科委项目,声表面波微传感器研究,沪科
鉴 [2001]G0005b.
2.上海市科委项目,声表面波微传感器技术中信号
流得生成、传播和处理研究,沪科鉴 [2003]第 0107.
3.国家自然科学基金面上项目, 全 LGS封装的声表

波高温压力传感器研究, 。编号,60274062.
4.国家自然科学基金青年基金项目, 格林函数精确
仿
真并优化新波动模式和谐频下的标签器件, 。编
号,10304012
5.航天创新科技基金项目。
Research on SJTU
Publications:
1 SAW sensors and applications,声表面波传感器及应用,施文康,刘艾,蔡
萍,杨明,仪器仪表学报,Vol.20(4),1999
2 Temperature Sensitive Cuts for Surface Acoustics Wave in Quartz,Ma
Weifang,Shi Wenkang,IEEE trans on UFFC,Vol.(48)1,2001
3 基于声表面波技术的微传感器, 施文康, 马伟方, 刘艾, 第四节全国微米 /纳
米技术学术会议, 2002
4 A New Member of Micro-sensor Family ----SAW Sensor,Shi Wenkang,Ma
Weifang,Liu Ai,International Symposium on Smart Structures & Micro-
system,2000.
5 Analysis and Design of Radio SAW ID-tags, Han Tao Shi Wenkang Wu
Jiahui,Chinese Journal of Scientific Instrument,2003.01
6 Digital Quadrature Demodulation for the Wireless SAW Sensing
Information, Wu Jiahui,Han tao,Shi Wenkang,Measurement & Control
Technology,2002.03
7 A Novel Wireless Measurement System Based on Surface-Acoustic-Wave
Devices, HAN Tao,LIN Xiao kun,SHI Wen kang,Journal of Shanghai
Jiaotong University,002.08
8 声表面波目标无线识别系统中 PC-DSP通信电路设计,Design of Communication
Circuit between PC and DSP in Wireless Identification Tags System
Based on SAW, 邓勇,韩韬,施文康,马伟方,刘艾 DENG Yong,HAN Tao,SHI
Wenkang,传感技术学报 Journal of Transcluction Technology,2001.04
Research on SJTU
Publications:
9 一种基于 SAW的无线标签识别系统,马伟方,施文康 MA Wei fang,SHI Wen kang,工业仪表与自
动化装置 Industrial Instrumentation & Automation,2001.03
10 新型无线测量系统研究,马伟方,施文康,计量技术 Measurement Technique,2001.02
11 基于声表面波传感的无线标签识别系统,Wireless Identification Tags System Based on
Surface Acoustic Wave Sensors,刘艾,马伟方,施文康 LIU Ai,MA Wei fang,SHI Wen kang,
上海交通大学学报 Journal of Shanghai Jiaotong University 2001.05
12 基于兰姆波技术的液体密度声传感器
Liquid Density Sensor Based on Lamb Wave Technology,施文康,马伟方,侯毅 SHI Wen
kang,MA Wei fang,HOU Yi,上海交通大学学报 Journal of Shanghai Jiaotong
University,2001.09
13 液体 -压电晶片界面上电边界条件对兰姆波激发的影响
Influence of electrical boundary conditions on lamb wave excitation at the
interface of liquid and piezoelectric substrate,马伟方,侯毅,施文康,邓明晰 MA Wei
fang 1,HOU Yi 1,SHI Wen kang 1,DENG Ming xi 2,声学技术 Technical Acoustics,
2001.01
14 声板波密度传感器及系统设计
Acoustic Plate Mode Sensor and System design,侯毅,施文康,马伟方 Hou Yi Shi Wenkang
Ma Weifang,仪表技术与传感器 Instrument Technique and Sensor 2001.02
15 兰姆波切向特性理论研究
Theoretical Study on Crystal Orientation Characteristics of Lamb Wave,马伟方,施文
康,侯毅,邓明晰 MA Wei-fang1,SHI Wen-kang1,HOU Yi1,DENG Ming-xi2,压电与声光
Piezoelectrics & Acoustooptics,2001.02
16 利用 SAW技术实现极低功耗无线数字通信
Ultra-low Power Comsumption Wireless Digital Communication Using SAW Technology,
李磊源,施文康,马伟方 LI Lei yuan,SHI Wen kang,MA Wei fang,压电与声光
Research on SJTU
Publications:
17 一种新型的声表面波目标识别系统研究
Study on Novel ID-Tag System based on Surface Acoustic Wave Technology,刘艾,马伟
方,施文康 Liu Ai; Ma Weifang; Shi Wenkang,传感技术学报 JOURNAL OF TRANSCLUCTION
TECHNOLOGY,2000.02
18 基于声表面波技术的无线测量系统研究
Research on a wireless measurement system based on SAW technology
19 延迟线型声表面波传感器的研究,施文康,刘艾,传感技术学报 JOURNAL OF TRANSCLUCTION
TECHNOLOGY,1999.4
20 液体 -压电晶片界面兰姆波激发的理论研究
Theoretical Research on Lamb Wave Excitation at the Interface of Liquid and
Piezoelectric Substrate,马伟方,施文康,邓明晰 MA Wei fang 1,SHI Wen kang 1,DENG
Ming xi 2,压电与声光 Piezoelectrics & Acoustooptics,2000.06
21 声表面波器件温度敏感性研究
Study on Temperature Sensitivity of Surface Acoustic Wave Devices,马伟方,施文康,
刘艾 MA Wei fang,SHI Wen kang,LIU,压电与声光 PIEZOELECTRICS & ACOUSTOOPTICS,
2000.05
22 声表面波器件体波效应抑制理论研究
Study on Bulk-wave Effects in Surface Acoustic Wave Devices,马伟方,施文康 MA Wei-
fang,SHI Wen-kang,压电与声光 PIEZOELECTRICS & ACOUSTOOPTICS,2000.01
23 一种谐振型声表面波传感器
A Kind of Resonance Surface Acoustic Wave Sensor,蔡萍,马伟方,施文康 Cai Ping Ma
Weifang Shi Wenkang,仪表技术与传感器 INSTRUMENT TECHNIQUE AND SENSOR,2000.07
24 基于辨识标签原理的无源声表面波传感器技术要点与发展趋势
The Key Technologies and Trends in Passive ID-Tags Based SAW Sensors,韩韬,施文
康 Han Tan Shi Wenkang,传感技术学报 Journal of Transcluction Technology,2000.04
Research on SJTU
Publications:
25 Tire Pressure Monitoring system Based on SAW Technology,Zhang guowei,
Shi Wenkang,Ji Xiaojun,ISIST,2002.
26 Properties of LGS Crystal and Its Applications in High-temperature
sensors,Ji Xiaojun,Shi Wenkang,ISTM,2003.
27 硅酸镓镧、钽酸镓镧和铌酸镓镧的声表面波传播特性研究 Investigation of SAW
propagation properties of LGS,LGT,LGN,张国伟,韩韬,Journal of
Shanghai Jiaotong university 交大学报
28 La3Ga5SiO4中声表面波传播的温度特性研究 temperature properties of SAW
propagation in LGS,PIEZOELECTRICS & ACOUSTOOPTICS压电与声光
29 Comparison Characteristics of SAW Propagation on LGT Quartz Substrates,
Zhang guowei,Shi Wenkang,声学学报英文版
30 Temperature characteristics of Surface Acoustic Waves Propagating on
La3Ga5SiO4 Substrates material science and
technology 材料科学与技术
31 LGS压电晶体及其声表面波特性的理论分析,LGS piezoelectric crystal and
investigation of its SAW properties吉小军,施文康,PIEZOELECTRICS &
ACOUSTOOPTICS压电与声光
32 无线声表面波传感信号的正交采样处理,Quadrature coherent detection of the
wireless SAW sensor signals杜锋,施文康,journal of Shanghai Jiaotong
university 交大学报
Research on SJTU
Publications:
34 Han,Tao and Shi,Wenkang,“Surface acoustic wave devices based wireless measurement
platform for sensors”,International Symposium on Optoelectronics and Microelectronics,
Vol.4601,SPIE,COEMA and Southeast University,Nov.9th Nanjing,China,2001 pp14-19
35 Han,Tao and Shi,Wenkang,“Review of passive and telemetric surface acoustic wave
sensors and system”,International Conference on electronic Measurement & Instruments,
ICEMI’2001,Nov,20th,Guilin,China pp446-449
36 Han,Tao Shi,Wenkang,Reflection of impedance loaded SAW IDT and its application in
wireless information transmission of sensors” (Accepted by Chinese Journal of
Electronics)
37 Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun,“Coupling-of-modes theory and its
application in the analysis of wireless ID-tag” Piezoelectrics & Acoustooptics Vol.24
(2) 2002 pp89-91 (in Chinese)
38 Han,Tao and Shi,Wenkang,“Design of surface acoustic wave based wireless measurement
system”,Piezoelectrics & Acoustooptics Vol.23 No.5,pp 327-329,369 2001(in Chinese)
39 Han,Tao Shi,Wenkang Wu,Jiahui and Li,Hanjun,High-resolution information extraction of
wireless SAW sensor and its hardware implementation”,Journal of Sensor Technology
Vol.14 No.4,2001 (in Chinese)
40 Han,Tao and Shi,Wenkang,“The application of surface acoustic wave devices in wireless
measurement system” Optics and Precision Engineering Vol.9(6) pp576-579 (in Chinese)
41 Han,Tao and Shi,Wenkang,“Study on a novel surface-acoustic-wave based wireless
measurement system”,Journal of Shanghai Jiaotong University,Vol.36(8) pp1165-1168 (in
Chinese)
42 Han,Tao and Shi,Wenkang,“Analysis and design of radio SAW ID-Tags”,Chinese Journal of
Scientific Instrument (in Chinese,to be accepted )
Research on SJTU
Publications:
43 Lu,Wenbo Han,Tao, An algorithm on amplitude and phase estimation of sine
signal” Journal of Shanghai Jiaotong University,(in Chinese,to be
accepted )
44 Han,Tao Shi,Wenkang and Ma,Weifang,“Lamb wave in piezoelectric plate
loading with a liquid layer and its potential as liquid density sensor”
45 Han Tao Shi Wenkang Wu Jiahui Analysis and Design of Radio SAW ID-
ags Chinese Journal of Scientific Instrument
46 Han Tao,shi Wenkang,Design of Surface Acoustic Wave Based Wireless
Measurement System,Piezoelectrics & Acoustooptics 2001,23(5),327-
329,369.
47 Han Tao,shi Wenkang Application of Surface Acoustic Wave Devices in
Wireless Measurement System Optics and Precision Engineering,2001,9(6),
576-579,
48 Han Tao,shi Wenkang,Compensation of Temperature-caused Cross Sensitivity
of Eddy Current Transducer INSTRUMENT TECHNIQUE AND SENSOR 2000,(2) 10-12
49 Han Tao,shi Wenkang,The design of a kind of non-contact type molten
aluminum resistivity measuring system Industrial Instrumentation &
Automation,164(2) 10-12
50 Han Tao,shi Wenkang,Sensing Scheme of Minim Liquid Density Based on Lamb-
Wave Chinese Journal of Medical Instrumentation2002,26(3) 172-173,209
Thanks !